Title | Microfabrication of rounded channel and waveguide integrated microlens using timed development and thermal reflow process |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Authors | Kim, J., K. Lee, K. W. Oh, and Y.K. Yoon |
Conference Name | The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences |
Date Published | 11/2009 |
Conference Location | Jeju Island, Korea |