Microfabrication of rounded channel and waveguide integrated microlens using timed development and thermal reflow process

TitleMicrofabrication of rounded channel and waveguide integrated microlens using timed development and thermal reflow process
Publication TypeConference Paper
Year of Publication2009
AuthorsKim, J., K. Lee, K. W. Oh, and Y.K. Yoon
Conference NameThe 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Date Published11/2009
Conference LocationJeju Island, Korea