Title | Adjustable refractive index method for complex microstructures by automated dynamic mode multidirectional UV lithography |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Authors | Kim, J., K. Lee, K. W. Oh, and Y.K. Yoon |
Conference Name | International Conference of IEEE Micro Electro Mechanical Systems |
Date Published | 01/2009 |
Conference Location | Sorrento, Italy |