Adjustable refractive index method for complex microstructures by automated dynamic mode multidirectional UV lithography

TitleAdjustable refractive index method for complex microstructures by automated dynamic mode multidirectional UV lithography
Publication TypeConference Paper
Year of Publication2009
AuthorsKim, J., K. Lee, K. W. Oh, and Y.K. Yoon
Conference NameInternational Conference of IEEE Micro Electro Mechanical Systems
Date Published01/2009
Conference LocationSorrento, Italy