High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability

TitleHigh-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability
Publication TypeJournal Article
Year of Publication2011
AuthorsJia, K., S. Samuelson, and H. Xie
JournalJournal of Microelectromechanical Systems
Date Published2011
ISSN1941-0158
DOI10.1109/JMEMS.2011.2127449
Short TitleJ. Microelectromech. Syst.