| Title | High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability |
| Publication Type | Journal Article |
| Year of Publication | 2011 |
| Authors | Jia, K., S. Samuelson, and H. Xie |
| Journal | Journal of Microelectromechanical Systems |
| Date Published | 2011 |
| ISSN | 1941-0158 |
| DOI | 10.1109/JMEMS.2011.2127449 |
| Short Title | J. Microelectromech. Syst. |
