Title | Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication |
Publication Type | Journal Article |
Year of Publication | 2011 |
Authors | Kim, J., M. G. Allen, and Y.K. Yoon |
Journal | Journal of Micromechanics and Microengineering |
Volume | 21 (3) |
Start Page | 035003 |