Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication

TitleComputer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication
Publication TypeJournal Article
Year of Publication2011
AuthorsKim, J., M. G. Allen, and Y.K. Yoon
JournalJournal of Micromechanics and Microengineering
Volume21 (3)
Start Page035003