An Electrothermal SCS Micromirror for Large Bi-Directional 2-D Scanning

TitleAn Electrothermal SCS Micromirror for Large Bi-Directional 2-D Scanning
Publication TypeConference Paper
Year of Publication2005
AuthorsJain, A., and H. Xie
Conference Name13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2005)
Date Published06/2005
PublisherIEEE
Conference LocationSeoul, Korea
DOI10.1109/SENSOR.2005.1496621