Title | An Electrothermal SCS Micromirror for Large Bi-Directional 2-D Scanning |
Publication Type | Conference Paper |
Year of Publication | 2005 |
Authors | Jain, A., and H. Xie |
Conference Name | 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2005) |
Date Published | 06/2005 |
Publisher | IEEE |
Conference Location | Seoul, Korea |
DOI | 10.1109/SENSOR.2005.1496621 |