A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater

TitleA Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater
Publication TypeConference Paper
Year of Publication2006
AuthorsWu, L., and H. Xie
Conference NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Date Published08/2006
PublisherIEEE
Conference LocationBig Sky, MT, USA
ISBN Number0-7803-9562-X
Abstract

We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124deg has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz

URLhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1708287
DOI10.1109/OMEMS.2006.1708287