| Title | A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater |
| Publication Type | Conference Paper |
| Year of Publication | 2006 |
| Authors | Wu, L., and H. Xie |
| Conference Name | IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 |
| Date Published | 08/2006 |
| Publisher | IEEE |
| Conference Location | Big Sky, MT, USA |
| ISBN Number | 0-7803-9562-X |
| Abstract | We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124deg has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz |
| URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1708287 |
| DOI | 10.1109/OMEMS.2006.1708287 |
