Title | A large vertical displacement electrothermal bimorph microactuator with very small lateral shift |
Publication Type | Journal Article |
Year of Publication | 2008 |
Authors | Wu, L., and H. Xie |
Journal | Sensors and Actuators A: Physical |
Volume | 145-146 |
Pagination | 371 - 379 |
Date Published | 07/2008 |
ISSN | 09244247 |
DOI | 10.1016/j.sna.2007.10.068 |
Short Title | Sensors and Actuators A: Physical |