A large vertical displacement electrothermal bimorph microactuator with very small lateral shift

TitleA large vertical displacement electrothermal bimorph microactuator with very small lateral shift
Publication TypeJournal Article
Year of Publication2008
AuthorsWu, L., and H. Xie
JournalSensors and Actuators A: Physical
Volume145-146
Pagination371 - 379
Date Published07/2008
ISSN09244247
DOI10.1016/j.sna.2007.10.068
Short TitleSensors and Actuators A: Physical