Title | A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens |
Publication Type | Conference Paper |
Year of Publication | 2007 |
Authors | Wu, L., and H. Xie |
Conference Name | TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference |
Date Published | 06/2007 |
Publisher | IEEE |
Conference Location | Lyon, France |
ISBN Number | 1-4244-0841-5 |
Keywords | Confocal imaging., Electrothermal bimorph actuator, Large vertical displacement (LVD), Lateral shift free (LSF), Microlens, micromirror |
Abstract | This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk- micromachining process. A 0.62 mm vertical displacement has been demonstrated at only 5.3 Vdc for a fabricated 0.8 mm by 0.8 mm micromirror, and both the lateral shift (10 mum) and tilting angle (0.7deg) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453 Hz. |
URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4300320 |
DOI | 10.1109/SENSOR.2007.4300320 |