A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

TitleA Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens
Publication TypeConference Paper
Year of Publication2007
AuthorsWu, L., and H. Xie
Conference NameTRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Date Published06/2007
PublisherIEEE
Conference LocationLyon, France
ISBN Number1-4244-0841-5
KeywordsConfocal imaging., Electrothermal bimorph actuator, Large vertical displacement (LVD), Lateral shift free (LSF), Microlens, micromirror
Abstract

This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk- micromachining process. A 0.62 mm vertical displacement has been demonstrated at only 5.3 Vdc for a fabricated 0.8 mm by 0.8 mm micromirror, and both the lateral shift (10 mum) and tilting angle (0.7deg) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453 Hz.

URLhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4300320
DOI10.1109/SENSOR.2007.4300320