A Lateral-shift-free LVD Microlens Scanner for Confocal Microscopy

TitleA Lateral-shift-free LVD Microlens Scanner for Confocal Microscopy
Publication TypeConference Paper
Year of Publication2007
AuthorsWu, L., and H. Xie
Conference Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
Date Published08/2007
Conference LocationHualien, Taiwan
ISBN Number978-1-4244-0641-8
KeywordsBimorph, Confocal microscopy, Large vertical displacement, Lateral shift free, tunable microlens

We report a lateral-shift-free (LSF) large-vertical-displacement (LVD) microlens scanner for tunable focusing applications such as confocal microscopy. A polymer microlens is integrated into a lens holder actuated by a LSF-LVD microactuator. The focal plane of the microlens can be vertically displaced 0.7 mm at only 7.5 V. The observed maximum lateral shift and tilt of the microlens during the entire vertical actuation are only about 13 mum and 0.74deg respectively. The resonance frequency of the vertical motion mode is 488 Hz.