| Title | A Lateral-shift-free LVD Microlens Scanner for Confocal Microscopy |
| Publication Type | Conference Paper |
| Year of Publication | 2007 |
| Authors | Wu, L., and H. Xie |
| Conference Name | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics |
| Date Published | 08/2007 |
| Publisher | IEEE |
| Conference Location | Hualien, Taiwan |
| ISBN Number | 978-1-4244-0641-8 |
| Keywords | Bimorph, Confocal microscopy, Large vertical displacement, Lateral shift free, tunable microlens |
| Abstract | We report a lateral-shift-free (LSF) large-vertical-displacement (LVD) microlens scanner for tunable focusing applications such as confocal microscopy. A polymer microlens is integrated into a lens holder actuated by a LSF-LVD microactuator. The focal plane of the microlens can be vertically displaced 0.7 mm at only 7.5 V. The observed maximum lateral shift and tilt of the microlens during the entire vertical actuation are only about 13 mum and 0.74deg respectively. The resonance frequency of the vertical motion mode is 488 Hz. |
| URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4373880 |
| DOI | 10.1109/OMEMS.2007.4373880 |
