A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

TitleA mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface
Publication TypeConference Paper
Year of Publication2009
AuthorsWu, L., A. Pais, S. Samuelson, S. Guo, and H. Xie
Conference Name15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009)
Date Published06/2009
PublisherIEEE
Conference LocationDenver, CO.
DOI10.1109/SENSOR.2009.5285647