Hongzhi Sun will be proposing his dissertation topic, "Sensing and Control
Electronics Design for Capacitive CMOS-MEMS Inertial Sensors" at 10am on Tuesday, December 14th in NEB 589. All are invited and refreshments will be provided.
Speaker: Wenjing Liu
Introduction: This talk is about the design, fabrication and characterization of a piezoelectrically actuated high-fill-factor tip-tilt-piston (TTP) micromirror with nearly zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The zero-initial-tilt (ZIT) and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon.
Refreshments will be served.
Speaker: Hongzhi Sun
Introduction: IMUs have wide automotive, consumer electronics, and medical applications. The focus of this talk is on a three-axis accelerometer and two single-axis gyroscopes. The presentation will include the CMOS-MEMS process, the interface circuit design, and the characterizations for the monolithic IMU.
Refreshments will be served.