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UF and IMG will be represented at the upcoming IEEE MEMS 2019 in January 2019 in Seoul, South Korea.
A 10nm-THICK HAFNIUM ZIRCONIUM OXIDE PIEZOELECTRIC TRANSDUCER FOR EXTREME MINIATURIZATION OF INTEGRATED SENSORS AND ACTUATORS
Mayur Ghatge, Glen Walters, Toshikazu Nishida, Roozbeh Tabrizian
University of Florida, Gainesville, FL., USA.
