Publications

Found 30 results
Author Title Type [ Year(Asc)]
Filters: Author is Allen, Mark G.  [Clear All Filters]
2021
Kagan, C. R., D. P. Arnold, M. G. Allen, and R. H. Olsson, "IoT4Ag: MEMS-Enabled Distributed Sensing, Communications, And Information Systems for The Internet Of Things For Precision Agriculture", 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), virtual, IEEE, 2021.
2017
Kim, J., Y-K. Yoon, and M. G. Allen, "Double-side exposure UV-LED CNC lithography for fine 3D microfabrication", 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, IEEE, 2017.
2014
Peterson, B., O. D. Oniku, W. C. Patterson, D. Le Roy, A. Garraud, F. Herrault, N. M. Dempsey, D. P. Arnold, and M. G. Allen, "Technology development for short-period magnetic undulators", Physics Procedia, vol. 52, 2014.
2012
Peterson, B., W. C. Patterson, F. Herrault, D. P. Arnold, and M. G. Allen, "Laser-micromachined permanent magnet arrays with spatially alternating magnetic field distribution", Tech. Dig. 12th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Apps. (PowerMEMS 2012), Atlanta, GA, IEEE, 12/2012.
2011
Kim, J., M. G. Allen, and Y.K. Yoon, "Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication", Journal of Micromechanics and Microengineering, vol. 21 (3), 2011.
Choi, S., Y.K. Yoon, S-H. Kim, and M. G. Allen, "Nonlinear sensitivity enhancement of resonant microsensors and its application to low power magnetic sensing", Journal of Micromechanics and Microengineering, vol. 21, 2011.
Yoon, Y.K., J-H. Park, J-W. Lee, M. R. Prausnitz, and M. G. Allen, "A Thermal Microjet System with Tapered Micronozzles Fabricated by Inclined UV Lithography for Transdermal Drug Delivery", Journal of Micromechanics and Microengineering, vol. 21, 2011.
2010
Choi, S-O., Y. Chun Kim, J-H. Park, J. Hutcheson, H. S. Gill, Y.K. Yoon, M. R. Prausnitz, and M. G. Allen, "An electrically active mironeedle array for electroporation", Biomedical Microdevices, vol. 12, no. 2, 2010.
2009
Arnold, D. P., and M. G. Allen, "Fabrication of Microscale Rotating Magnetic Machines", Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines, New York, Springer, pp. 157-190, 2009.
Zhao, Y., Y.K. Yoon, S-O. Choi, X. Wu, Z. Liu, and M. G. Allen, "Three dimensional metal pattern transfer for replica molded microstructures", Applied Physics Letters, vol. 94, no. 2, 2009.
2008
Herrault, F., D. P. Arnold, I. Zana, P. Galle, and M. G. Allen, "High temperature operation of multi-watt, axial-flux, permanent-magnet microgenerators", Sensors & Actuators A, vol. 148, pp. 299-305, NOV, 2008.
Wu, X., G. Yuan, Y.K. Yoon, and M. G. Allen, "Kinematically Stabilized Microbubble Actuator Arrays", Journal of Microelectromechanical Systems, vol. 17, issue 1, pp. 124 - 132, 02/2008.
2006
Arnold, D. P., F. Herrault, I. Zana, P. Galle, J. Park, S. Das, J. H. Lang, and M. G. Allen, "Design optimization of an 8-Watt, microscale, axial-flux, permanent-magnet generator", J. Micromech. Microeng., vol. 16, no. 9, pp. s290-s296, SEP, 2006.
Arnold, D. P., S. Das, F. Cros, I. Zana, J. H. Lang, and M. G. Allen, "Magnetic induction machines integrated into bulk-micromachined silicon", J. Microelectromech. Syst., vol. 15, no. 2, pp. 406-414, APR, 2006.
Arnold, D. P., S. Das, J. Park, I. Zana, J. H. Lang, and M. G. Allen, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators - Part II: design, fabrication, and testing", J. Microelectromech. Syst., vol. 15, no. 5, pp. 1351-1363, OCT, 2006.
Das, S., D. P. Arnold, I. Zana, J. Park, M. G. Allen, and J. H. Lang, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators - Part I: modeling", J. Microelectromech. Syst., vol. 15, no. 5, pp. 1330-1350, OCT, 2006.
2005
Arnold, D. P., I. Zana, and M. G. Allen, "Analysis and optimization of vertically oriented, throughwafer, laminated magnetic cores in silicon", J. Micromech. Microeng, vol. 15, no. 5, pp. 971-977, MAY, 2005.
Arnold, D. P., I. Zana, J. Park, S. Das, Y. Joung, D. Veazie, J. H. Lang, and M. G. Allen, "High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators", 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 05), vol. 1, Seoul, Korea, pp. 701-704, June, 2005.
Zana, I., F. Herrault, D. P. Arnold, and M. G. Allen, "Magnetic patterning of permanent-magnet rotors for microscale motor/generators", Tech. Dig. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 116-119, November, 2005.
Das, S., D. P. Arnold, I. Zana, J. Park, J. H. Lang, and M. G. Allen, "Multi-watt electric power from a microfabricated permanent-magnet generator", Tech. Dig. 18th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2005), Miami Beach, FL, pp. 287-290, January, 2005.
Arnold, D. P., I. Zana, F. Herrault, P. Galle, J. Park, S. Das, J. H. Lang, and M. G. Allen, "Optimization of a microscale, axial-flux, permanent-magnet generator", Tech. Dig. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 165-168, November, 2005.
Arnold, D. P., P. Galle, F. Herrault, S. Das, J. H. Lang, and M. G. Allen, "A self-contained, flow-powered microgenerator system", Tech. Dig. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 113-115, November, 2005.
2004
Arnold, D. P., F. Cros, I. Zana, D. Veazie, and M. G. Allen, "Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials", J. Microelectromech. Syst., vol. 13, no. 5, pp. 791-798, OCT, 2004.
Zana, I., D. P. Arnold, and M. G. Allen, "Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications", Electrochemical Processing in ULSI and MEMS (Electrochem. Soc. Proc. Vol. 2004-17), pp. 404-411, May, 2004.
Arnold, D. P., S. Das, F. Cros, I. Zana, J. H. Lang, and M. G. Allen, "Magnetic induction machines embedded in fusion-bonded silicon", Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), pp. 129-132, June, 2004.