Publications

Xie, H., S. Koppal, X. Zhang, L. Zhou, and C. Duan, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.

Zhang, X., S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid", Optics Express, vol. 24, issue 4, no. 4, pp. 3479-3487, 02/2016.

Torres, D., T. Wang, J. Zhang, X. Zhang, S. Dooley, X. Tan, H. Xie, and N. Sepulveda, "VO₂-Based MEMS Mirrors", Journal of Microelectromechanical Systems, pp. 780-787, 2016.

Park, H-C., X. Zhang, W. Yuan, L. Zhou, H. Xie, and X. Li, "Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT", Optics Letters, vol. 44, issue 9, pp. 2232, Jan-01-2019.

Wang, H., L. Zhou, X. Zhang, and H. Xie, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.

Duan, C., W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, "A Self-Aligned 45°-Tilted Two-Axis Scanning Micromirror for Side-View Imaging", Journal of Microelectromechanical Systems, vol. 4, pp. 799-811, 2016.

Espinosa, A., K. Rabenorosoa, C. Clévy, B. Komati, P. Lutz, X. Zhang, S. Samuelson, and H. Xie, "Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications", International Journal of Optomechatronics, vol. 8, issue 3, pp. 179 - 194, 07/2014.

Zhang, X., C. Duan, L. Liu, X. Li, and H. Xie, "A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage", Sensors and Actuators A: Physical, vol. 233, pp. 239 - 245, 09/2015.

Han, F., W. Wang, X. Zhang, and H. Xie, "Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers", Journal of Microelectromechanical Systems, vol. 4, pp. 750-760, 2016.

Zhang, H., D. Xu, X. Zhang, Q. Chen, H. Xie, and S. Li, "Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror", Sensors, vol. 15, issue 12, pp. 30991 - 31004, Jan-12-2015.

Han, F., W. Wang, X. Zhang, and H. Xie, "Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror", Optics Express, vol. 24, issue 20, pp. 22650, Jan-01-2016.

Liu, L., E. Wang, X. Zhang, W. Liang, X. Li, and H. Xie, "MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan", Sensors and Actuators A: Physical, vol. 215, pp. 89 - 95, 08/2014.

Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.

Wang, D., H. Liu, J. Zhang, Q. Chen, W. Wang, X. Zhang, and H. Xie, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.

Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.

Zhou, L., X. Zhang, and H. Xie, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.

Tseng, V. Farm- Guoo, J. Li, X. Zhang, J. Ding, Q. Chen, and H. Xie, "An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications", Sensors and Actuators A: Physical, vol. 206, pp. 1 - 9, 2/2014.

Wang, D., C. Duan, X. Zhang, Z. Yun, A. Pozzi, and H. Xie, "Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe", Applied Optics, vol. 55, issue 25, pp. 6930, Jan-01-2016.

Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.

Wang, D., X. Zhang, L. Zhou, M. Liang, D. Zhang, and H. Xie, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.

Zhang, X., B. Li, X. Li, and H. Xie, "A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 912 - 915, 6/2015.

Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.

Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.

Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.

Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.