Publications

Found 36 results
Author Title [ Type(Desc)] Year
Filters: First Letter Of Last Name is Z and Author is Zhang, Xiaoyang  [Clear All Filters]
Book Chapter
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
Conference Paper
Duan, C., W. Wang, X. Zhang, J. Ding, Q. Chen, A. Pozzi, and H. Xie, "A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging", 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, IEEE, pp. 948 - 951, 1/2015.
Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
Zhang, X., J. Mavadia-Shukla, W. Yuan, H-C. Park, X. Li, and H. Xie, "Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOSOptical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, vol. 9697, San Francisco, California, United States, SPIE, pp. 96970O, 2016.
Park, H-C., X. Zhang, J. Mavadia-Shukla, W. Yuan, H. Xie, and X. Li, "Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOS Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, San Francisco, California, United States, SPIE, 2016.
Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
Duan, C., X. Zhang, D. Wang, Z. Zhou, P. Liang, A. Pozzi, and H. Xie, "An endoscopic forward-viewing OCT imaging probe based on a two-axis scanning mems mirror", Biomedical Imaging (ISBI), 2014 IEEE 11th International Symposium on, pp. 1397-1400, April, 2014.
Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.
Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.
Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.
Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.
Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.
Zhang, X., B. Li, X. Li, and H. Xie, "A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 912 - 915, 6/2015.
Wang, D., X. Zhang, L. Zhou, M. Liang, D. Zhang, and H. Xie, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.