Publications
Found 4 results
Author Title [ Type] Year Filters: First Letter Of Last Name is Z and Author is Zhao, Qian Cheng [Clear All Filters]
"Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 264 - 267, 2010.
, "An acceleration switch with a robust latching mechanism and cylindrical contacts", Journal of Micromechanics and Microengineering, vol. 20, issue 5, pp. 055006, 05/2010.
, "A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure", Journal of Microelectromechanical Systems, vol. 19, issue 3, pp. 458 - 468, 06/2010.
, "Normally On/Off Integrated Latching Acceleration Switch With Controlled Fracture Beams and Independent Multicontact", IEEE Electron Device Letters, vol. 31, issue 2, pp. 129 - 131, 02/2010.
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