Found 5 results
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Liao, W., W. Liu, L. Xi, J. Sun, Y. Zhu, L. Wu, H. Jiang, and H. Xie, "Miniature Photoacoustic Imaging Probe Using MEMS Scanning Micromirror", IEEE Optical MEMS and Nanophotonics, Istanbul, Turkey, 08/2011.
Zhu, Y., W. Liu, K. Jia, W. Liao, and H. Xie, "A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift", Sensors and Actuators A: Physical, vol. 167, issue 2, no. 6, pp. 495 - 501, 6/2011.
Liao, W., W. Liu, Y. Zhu, Y. Tang, B. Wang, and H. Xie, "A Tip-Tilt-Piston Micromirror With Symmetrical Lateral-Shift-Free Piezoelectric Actuators", IEEE Sensors Journal, vol. 13, issue 8, pp. 2873 - 2881, 08/2013.
Liu, W., Y. Zhu, K. Jia, W. Liao, Y. Tang, B. Wang, and H. Xie, "A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator", Sensors and Actuators A: Physical, vol. 193, pp. 121 - 128, 4/2013.