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Zhu, Y., W. Liu, K. Jia, W. Liao, and H. Xie, "A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift", Sensors and Actuators A: Physical, vol. 167, issue 2, no. 6, pp. 495 - 501, 6/2011.