Publications

Found 25 results
Author Title Type [ Year(Asc)]
Filters: Author is Zhou, Liang  [Clear All Filters]
2020
Zhou, L., X. Yu, P. Feng, J. Li, and H. Xie, "A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning", Optics Express, Jul-22-2020.
Zhou, L., X. Yu, and H. Xie, "A Robust Compact Lens Scanner with Large Tunable Range", 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada, IEEE, 2020.
2019
Zhou, L., Y. Chen, X. Chen, Y. Hao, J. Coleman, and H. Xie, "Development of an electrothermal MEMS mirror based two-photon microscopy probe", Multiphoton Microscopy in the Biomedical Sciences XIXMultiphoton Microscopy in the Biomedical Sciences XIX, San Francisco, United States, SPIE, 2019.
Zhou, L., X. Zhang, and H. Xie, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.
Zhou, L., D. Wang, and H. Xie, "An Electrothermal Micromirror with J-shaped Bimorph Microactuators", 2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, Korea (South), IEEE, 2019.
Xie, H., S. Koppal, X. Zhang, L. Zhou, and C. Duan, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.
Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Zhou, L., and H. Xie, "A Novel Out-of-Plane Electrothermal Bistable Microactuator", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, Berlin, Germany, IEEE, 2019.
Park, H-C., X. Zhang, W. Yuan, L. Zhou, H. Xie, and X. Li, "Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT", Optics Letters, vol. 44, issue 9, pp. 2232, Jan-01-2019.
2018
Luo, S., D. Wang, J. Tang, L. Zhou, C. Duan, D. Wang, H. Liu, Y. Zhu, G. Li, H. Zhao, et al., "Circumferential-scanning endoscopic optical coherence tomography probe based on a circular array of six 2-axis MEMS mirrors", Biomedical Optics Express, vol. 9, issue 5, pp. 2104, Jan-01-2018.
Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
Luo, S., L. Zhou, D. Wang, C. Duan, H. Liu, Y. Zhu, G. Li, H. Zhao, J. Tang, Y. Wu, et al., "A Miniature Endoscopic Optical Coherence Tomography Probe Based on C-Lens", IEEE Photonics Journal, vol. 10, issue 5, pp. 1 - 10, Jan-10-2018.
Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.
Luo, S., Q. Guo, H. Zhao, X. An, L. Zhou, H. Xie, J. Tang, X. Wang, H. Chen, and L. Huo, "Noise Reduction of Swept-Source Optical Coherence Tomography via Compressed Sensing", IEEE Photonics Journal, vol. 10, issue 1, pp. 1 - 9, Jan-02-2018.
Wang, H., L. Zhou, X. Zhang, and H. Xie, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.
2017
Wang, W., Q. Chen, D. Wang, L. Zhou, and H. Xie, "A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift", 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, IEEE, 2017.
Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Yang, B., L. Zhou, X. Zhang, S. Koppal, and H. Xie, "A compact MEMS-based wide-angle optical scanner", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
Wang, D., X. Zhang, L. Zhou, M. Liang, D. Zhang, and H. Xie, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
2016
Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.
Duan, C., W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, "A Self-Aligned 45°-Tilted Two-Axis Scanning Micromirror for Side-View Imaging", Journal of Microelectromechanical Systems, vol. 4, pp. 799-811, 2016.
Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.
Zhang, X., S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid", Optics Express, vol. 24, issue 4, no. 4, pp. 3479-3487, 02/2016.
2015
Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.