Publications

Found 24 results
Author Title [ Type(Desc)] Year
Filters: Author is Gary K. Fedder  [Clear All Filters]
Conference Paper
Jain, A., T. Xie, Y. Pan, G. K. Fedder, and H. Xie, "A 2-Axis Electrothermal SCS Micromirror for Biomedical Imaging", Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, HI, USA, 2003.
Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.
Xie, H., and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope", IEEE SENSORS 2002Proceedings of IEEE Sensors, vol. 2, Orlando, FL, USA, IEEE, pp. 1413 - 1418, 2002.
Jain, A., H. Qu, S. Todd, G. K. Fedder, and H. Xie, "Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation", 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 06/2004.
Jain, A., S. Todd, G. K. Fedder, and H. Xie, "A Large-Scanning-Angle, Electrothermal SCS Micromirror for Biomedical Imaging", Frontiers in Optics: The 87th OSA Annual Meeting, Tucson, AZ, USA, 10/2003.
Xie, H., G. K. Fedder, and Y. Pan, "MEMS-based Optical Coherence Tomography", Proceedings of at the SPIE Photonics West: MOEMS-MEMS 2005, San Jose, CA, 2005.
Xie, H., G. K. Fedder, Z. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.
Xie, H., Y. Pan, and G. K. Fedder, "A SCS CMOS micromirror for optical coherence tomographic imaging", MEMS 2002 IEEE International Conference. , Las Vegas, NV, USA, IEEE, pp. 495 - 498, 2002.
Xie, H., A. Jain, T. Xie, Y. Pan, and G. K. Fedder, "A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications", Conference on Lasers and Electro Optics (CLEO) 2003, Baltimore, MD, 06/2003.
Jain, A., T. Xie, Y. Pan, G. K. Fedder, and H. Xie, "A Two-Axis SCS Electrothermal Micromirror for Biomedical Imaging", 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, Hawaii, August, 2003.
Journal Article
Xie, H., Y. Pan, and G. K. Fedder, "A CMOS-MEMS Mirror with Curled-Hinge Comb Drives", Journal of Microelectromechanical Systems, vol. 12, issue 4, no. 4, pp. 450 - 457, 08/2003.
Xie, H., Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror", Sensors and Actuators A: Physical, vol. 103, no. 1-2, pp. 237 - 241, 2003.
Pan, Y., H. Xie, and G. K. Fedder, "Endoscopic Optical Coherence Tomography Based on a CMOS-MEMS micromirror", Optics Letters, vol. 26, no. 24, pp. 1966-1968, DEC, 2001.
Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with a Modified Microelectromechanical Systems Mirror for Detection of Bladder Cancers", Applied Optics, vol. 42, issue 31, pp. 6422–6426, 11/2003.
Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with New MEMS Mirror", Electronics Letters, vol. 39, no. 21, pp. 1535, 10/2003.
Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.
Xie, H., and G. K. Fedder, "Integrated Microelectromechanical Gyroscopes", Journal of Aerospace Engineering, vol. 16, no. 2: ASCE, pp. 65-75, 04/2003.
Wu, J., G. K. Fedder, and L.R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer", IEEE Journal of Solid-State Circuits, vol. 39, issue 5, pp. 722 - 730, 05/2004.
Chen, F., H. Xie, and G. K. Fedder, "A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control", IEEE Transaction on Magnetics, vol. 37, no. 4, pp. 1915-1918, JUL, 2001.
Xie, H., G. K. Fedder, Y. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", International Journal of Nonlinear Sciences and Numerical Simulation, vol. 3, no. 3-4, 2002.
Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.
Xie, H., Y. Pan, and G. K. Fedder, "A SCS Micromirror for Optical Coherance Tomographic Imaging", Sensors & Actuators, vol. 103, pp. 237-241, JAN, 2003.
Jain, A., A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, "A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography", IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, issue 3, pp. 636 - 642, 05/2004.
Xie, H., and G. K. Fedder, "Vertical Comb-finger Capacitive Actuation and Sensing for CMOS-MEMS", Sensors & Actuators, vol. 95, pp. 212-221, 01/2002.