Publications

Luo, J., Z. Chen, Y. Ding, Q. Chen, J. Ding, J. Cheng, and H. Xie, "A large-piston scanning electrothermal micromirror with a temperature control frame", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.

Chen, Q., J. Ding, W. Wang, and H. Xie, "A high fill factor 1×20 MEMS mirror array based on ISC bimorph structure", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.