Publications
"A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.
, "A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR", 2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, Korea (South), IEEE, 2019.
, "Analysis of a Composite Piezoelectric Circular Plate with Initial Stresses for MEMS", International Mechanical Engineering Congress & Exposition, ASME Paper IMECE2002-39337, New Orleans, LA, November, 2002.
, "Fully batch-fabricated MEMS magnetic vibrational energy harvesters", Tech. Dig. 9th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Apps. (PowerMEMS 2009), Washington, DC, December, 2009.
, "Design Optimization and Implementation of a Miniature Optical Coherence Tomography Probe Based on a MEMS Mirror", the 4th International Symposium on Photoelectronic Detection and Imaging (ISPDI 2011), Beijing, China, May 24- 26, 2011.
, "Integrated Power Inductor with Silicon Substrate Molding", 2006 Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT’06)., Singapore, 06/2006.
, "Wax-bonded NdFeB micromagnets for microelectromechanical systems application", J. Applied Physics, vol. 103, pp. 07E109, 04/2008.
, "Wideband RELAX and Wideband CLEAN for Aeroacoustic Imaging", 9th AIAA/CEAS Aeroacoustics Conference, AIAA Paper 2003-3197, Hilton Head, SC, May, 2003.
, "A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 212 - 215, 7/2015.
, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.
, "Design and Fabrication of Integrated Power Inductor Based on Silicon Molding Technology", Proc. of the 38th Annual IEEE Power Electronics Specialists Conference (PESC'07), Orlando, FL, IEEE, 06/2007.
, "Tiered deposition of sub-5 nm ferroelectric Hf 1-x Zr x O 2 films on metal and semiconductor substrates", Applied Physics Letters, vol. 112, issue 19, pp. 192901, Jul-05-2018.
, Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates, 2018.
, "High-temperature and high-field cycling reliability of PZT films embedded within 130 nm CMOS", 2018 IEEE International Reliability Physics Symposium (IRPS)2018 IEEE International Reliability Physics Symposium (IRPS), Burlingame, CA, IEEE, 2018.
, , "Investigation of Airbrushing for Fabricating Microelectrodes in Microfluidic Devices", Electroanalysis, vol. 20, issue 6, pp. 663 - 670, 03/2008.
, "Batch-fabrication and characterization of miniaturized axisymmetric electropermanent magnets", 17th PowerMEMS, Kanazawa, Japan, 2017.
, "Direct measurement and microscale mapping of nanoNewton to milliNewton magnetic forces", AIP Advances, vol. 7, issue 5, pp. 056809, 05/2017.
, "Sub-millimeter electropermanent magnets for microgrippers", Proc. 2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS 2017), Montreal, Canada, 07/2017.
, "Magnetic Assembly and Crosslinking of Nanoparticles for Releasable Magnetic Microstructures", ACS Nano, pp. 150926111147007, 09/2015.
, "Microfabrication of magnetically attached end effectors for micro/milli robots", Proc. 2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS 2017), Montreal, Canda, 07/2017.
, "Direct measurement and microscale mapping of nanoNewton to milliNewton magnetic forces", AIP Advances, vol. 7, issue 5, pp. 056809, Jan-05-2017.
, "Low-Temperature Micropatterning of Thick-Film BaFe12O19 Composites on Semiconductor Substrates for Integrated Millimeter Wave Devices", 2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), Ann Arbor, MI, IEEE, 2018.
, "Simulation and experimental validation of a selective magnetization process for batch-patterning magnetic layers", Journal of Physics: Conference Series, vol. 660, no. 1, pp. 012006, 2015.
, "Investigation of Ferromagnetic Resonance Shift in Screen-Printed Barium Ferrite/Samarium Cobalt Composites", IEEE Transactions on Microwave Theory and Techniques, vol. 67, issue 8, pp. 3230 - 3236, Jan-08-2019.
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