Publications

Xie, H., Y. Pan, and G. K. Fedder, "A CMOS-MEMS Mirror with Curled-Hinge Comb Drives", Journal of Microelectromechanical Systems, vol. 12, issue 4, no. 4, pp. 450 - 457, 08/2003.

Wang, D., C. Duan, X. Zhang, Z. Yun, A. Pozzi, and H. Xie, "Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe", Applied Optics, vol. 55, issue 25, pp. 6930, Jan-01-2016.

Wang, W., J. Chen, A. S. Zivkovic, Q. A. A. Tanguy, and H. Xie, "A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror", Journal of Microelectromechanical Systems, vol. 25, no. 2, pp. 347-355, 04/2016.

Wang, D., P. Liang, S. Samuelson, H. Jia, J. Ma, and H. Xie, "Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors", Biomedical Optics Express, vol. 4, issue 10, pp. 2066, 2013.

Chen, K.-H., F. Ren, A. Pais, H. Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, et al., "Cu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, issue 5, pp. 2166, 2009.

Pal, S., and H. Xie, "A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage", Sensors & Actuators: A. Physical, vol. 170, pp. pp. 156-163, 2011.

Wang, Z., H. Adler, D. Chan, A. Jain, H. Xie, Z.L. Wu, and Y. Pan, "Cystoscopic optical coherence tomography for urinary bladder imaging in vivo", in Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine X; V. V. Tuchin, J. A. Izatt, J. G. Fujimoto, eds., vol. 6079, no. 60790J, pp. 91-99, FEB, 2006.

Tanguy, Q., S. Bargiel, H. Xie, N. Passilly, M. Barthès, O. Gaiffe, J. Rutkowski, P. Lutz, and C. Gorecki, "Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography", Micromachines, vol. 8, issue 6, pp. 146, Jan-06-2017.

Tseng, V. F. G., and H. Xie, "Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching", Journal of Micromechanics and Microengineering, vol. 23, issue 3, pp. 035025, 03/2013.

Min, M., W. LEE, T. Burks, J. Jordan, A. Schumann, J. Schueller, and H. Xie, "Design of a hyperspectral nitrogen sensing system for orange leaves", Computers and Electronics in Agriculture, vol. 63, issue 2, pp. 215 - 226, 10/2008.

Pal, S., and H. Xie, "Distributed and lumped element models for a bimorph-actuated micromirror", Journal of Micromechanics and Microengineering, vol. 20, no. 4, pp. 045020, 2010.

Xie, H., "Editorial for the Special Issue on MEMS Mirrors", Micromachines, vol. 9, issue 3, pp. 99, Jan-03-2018.

Tseng, V. Farm- Guoo, J. Li, X. Zhang, J. Ding, Q. Chen, and H. Xie, "An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications", Sensors and Actuators A: Physical, vol. 206, pp. 1 - 9, 2/2014.

Zhou, L., X. Zhang, and H. Xie, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.

Jain, A., and H. Xie, "An electrothermal microlens scanner with low-voltage large-vertical-displacement actuation", IEEE Photonics Technology Letters, vol. 17, issue 9, pp. 1971 - 1973, 09/2005.

Wu, L., and H. Xie, "An electrothermal micromirror with dual reflective surfaces for circumferential scanning endoscopic imaging", Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 8, no. 1, pp. 013030, MAR, 2009.

Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.

Todd, S., and H. Xie, "An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator", Journal of Microelectromechanical Systems, vol. 17, issue 1, pp. 213 - 225, 02/2008.

Xie, H., Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror", Sensors and Actuators A: Physical, vol. 103, no. 1-2, pp. 237 - 241, 2003.

Pan, Y., H. Xie, and G. K. Fedder, "Endoscopic Optical Coherence Tomography Based on a CMOS-MEMS micromirror", Optics Letters, vol. 26, no. 24, pp. 1966-1968, DEC, 2001.

Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with a Modified Microelectromechanical Systems Mirror for Detection of Bladder Cancers", Applied Optics, vol. 42, issue 31, pp. 6422–6426, 11/2003.

Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with New MEMS Mirror", Electronics Letters, vol. 39, no. 21, pp. 1535, 10/2003.

Wang, D., L. Fu, X. Wang, Z. Gong, S. Samuelson, C. Duan, H. Jia, J. Ma, and H. Xie, "Endoscopic swept-source optical coherence tomography based on a two-axis microelectromechanical system mirror", Journal of Biomedical Optics, vol. 18, issue 8, pp. 086005, 08/2013.

Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.

Pal, S., and H. Xie, "Fabrication of robust electrothermal MEMS devices using aluminum–tungsten bimorphs and polyimide thermal isolation", Journal of Micromechanics and Microengineering, vol. 22, issue 11, pp. 115036, 11/2012.