Publications

Found 299 results
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Fu, L., A. Jain, H. Xie, C. Cranfield, and M. Gu, "Integration of a Double-Clad Photonic Crystal Fiber, a GRIN Lens and a MEMS Mirror for Nonlinear Optical Microscopy", Biomedical Optics 2006, Ft. Lauderdale, FL, 03/2006.
Liu, Y., Y. Feng, X. Sun, L. Zhu, X. Cheng, Q. Chen, Y. Liu, and H. Xie, "Integrated tilt angle sensing for large displacement scanning MEMS mirrors", Optics Express, vol. 26, issue 20, pp. 25736, Jan-01-2018.
Wang, M., K. Ngo, I. Batarseh, and H. Xie, "Integrated Power Inductor with Silicon Substrate Molding", 2006 Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT’06)., Singapore, 06/2006.
Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
Cheng, X., H. Lu, Z. Lou, H. Xie, W. Wang, and M. Zheng, "An integrated optoelectronic position sensor for MEMS scanning mirrors", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.
Xie, H., and G. K. Fedder, "Integrated Microelectromechanical Gyroscopes", Journal of Aerospace Engineering, vol. 16, no. 2: ASCE, pp. 65-75, 04/2003.
Qu, H., D. Fang, and H. Xie, "An Integrated Fully-Differential CMOS-MEMS Z-axis Accelerometer Utilizing a Torsional Suspension", IEEE NEMS 2008, Sanya, China, 01/2008.
Wang, D., S. Strassle Rojas, A. Shuping, Z. Tasneem, S. Koppal, and H. Xie, "An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar", 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, IEEE, 2018.
Tseng, V. Farm- Guoo, L. Wu, and H. Xie, "Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 176 - 179, 6/2015.
Tseng, V. Farm- Guoo, and H. Xie, "Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching", IEEE Transactions on Electron Devices, vol. 61, issue 7, pp. 2302 - 2308, 7/2014.
Wang, Z., C. Lee, W.C. Waltzer, J. Liu, H. Xie, Z. J. Yuan, and Y. Pan, "in vivo bladder imaging with MEMS-based endoscopic Spectral Domain Optical Coherence Tomography", Journal of Biomedical Optics, vol. 12, no. 034009, 06/2007.
Sun, J., L. Wu, and H. Xie, "In vivo 3D and Doppler OCT imaging using electrothermal MEMS scanning mirrors", Photonics West 2010, San Francisco, California, 2010.
Sun, H., F. Maarouf, D. Fang, K. Jia, and H. Xie, "An improved low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers", Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on , Sanya, China, 01/2008.
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Chen, H., M. Li, Y. Zhang, H. Xie, C. Chen, Z. Peng, and S. Su, "H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems", Sensors, vol. 18, issue 2, pp. 508, Jan-02-2018.
Liu, W., W. Liao, K. Jia, Y. Zhu, H. Xie, B. Wang, and Y. Tang, "Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator", Integrated Ferroelectrics, vol. 150, issue 1, pp. 14 - 22, 01/2014.
Wang, H., Z. Chen, and H. Xie, "A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.
Qu, H., D. Fang, A. Sadat, J. Yuan, and H. Xie, "High-Resolution Integrated Micro Gyroscope for Space Applications", 41st Space Congress, Cape Canaveral, Florida, USA, 04/2004.
Li, J., V. Farm- Guoo Tseng, Z. Xiao, and H. Xie, "A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC–DC Converters", IEEE Transactions on Power Electronics, vol. 32, issue 5, pp. 3858 - 3867, Jul-07-2016, 2017.
Li, J., V. Tseng, Z. Xiao, and H. Xie, "A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC-DC Converters", IEEE Transactions on Power Electronics, pp. 1 - 1, 2016.
Jia, K., S. Pal, and H. Xie, "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 67 -68, 08/2009.
Jia, K., S. Samuelson, and H. Xie, "High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability", Journal of Microelectromechanical Systems, 2011.
Chen, Q., J. Ding, W. Wang, and H. Xie, "A high fill factor 1×20 MEMS mirror array based on ISC bimorph structure", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.
Yang, H., L. Xi, S. Samuelson, H. Xie, L. Yang, and H. Jiang, "Handheld miniature probe integrating diffuse optical tomography with photoacoustic imaging through a MEMS scanning mirror", Biomedical Optics Express, vol. 4, issue 3, pp. 427, 2013.
Jain, A., and H. Xie, "Half-Millimeter-Range Vertically Scanning Microlenses for Microscopic Focusing Applications", Hilton Head 2006: Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, pp. 74-77, 06/2006.