Publications

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M
Martin, D., J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida, "A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements", J. Microelectromechanical Systems, vol. 16, no. 6, pp. 1289-1302, DEC, 2007.