Publications

Rassay, S., F. Hakim, C. Li, C. Forgey, N. Choudhary, and R. Tabrizian, "A Segmented‐Target Sputtering Process for Growth of Sub‐50 nm Ferroelectric Scandium–Aluminum–Nitride Films with Composition and Stress Tuning", physica status solidi (RRL) – Rapid Research Letters, vol. 15, issue 5, pp. 2100087, Jan-05-2021.

Rassay, S., D. Mo, C. Li, N. Choudhary, C. Forgey, and R. Tabrizian, "Intrinsically Switchable Ferroelectric Scandium Aluminum Nitride Lamb-Mode Resonators", IEEE Electron Device Letters, vol. 42, issue 7, pp. 1065 - 1068, Jan-07-2021.