Publications

Found 5 results
Author Title Type [ Year(Asc)]
Filters: Author is Fox, Robert M.  [Clear All Filters]
2006
Martin, D., J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida, "Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements", 44th AIAA Aerospace Sciences Meeting and Exhibit, AIAA Paper 2006-1246, Reno, NV, January, 2006.
2005
Martin, D., K. Kadirvel, J. Liu, R. M. Fox, M. Sheplak, and T. Nishida, "Surface and Bulk Micromachined Dual Back-Plate Condenser Microphone", 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), Miami, FL, January, 2005.