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Williams, M. D., B. A. Griffin, A. Ecker, J. Meloy, and M. Sheplak, "An Aluminum Nitride Piezoelectric Microphone for Aeroacoustics Applications", Hilton Head 2010: A Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, Transducer Research Foundation, Inc., 06/2010.