Publications
"A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.
, "Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.
, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.
, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", International Journal of Nonlinear Sciences and Numerical Simulation, vol. 3, no. 3-4, 2002.
, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.
, "Parametric study of water vapor absorption into a constrained thin film of lithium bromide solution", International Journal of Heat and Mass Transfer, vol. 55, issue 21-22, pp. 5687 - 5695, Jan-10-2012.
, "A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift", Sensors and Actuators A: Physical, vol. 167, issue 2, no. 6, pp. 495 - 501, 6/2011.
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