Publications

Found 1 results
Author Title [ Type(Desc)] Year
Filters: First Letter Of Title is P and Author is Hongwei Qu  [Clear All Filters]
Journal Article
Qu, H., and H. Xie, "Process Development for CMOS-MEMS Sensors With Robust, Electrically Isolated Bulk Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 16, issue 5, pp. 1152 - 1161, 10/2007.