Publications

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Liu, L., S. Pal, and H. Xie, "MEMS mirrors based on a curved concentric electrothermal actuator", Sensors and Actuators A: Physical (In Press), 2012.
Liu, L., L. Wu, J. Sun, E. Lin, and H. Xie, "Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias", Journal of Biomedical Optics, vol. 16, issue 2, pp. 026006, 2011.
Liu, L., S. Pal, and H. Xie, "MEMS Mirrors Based on Curved Concentric Electrothermal Actuators with Very Small Lateral Shift and Tilt", Transducers'11, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, 06/2011.