Publications

Found 4 results
Author Title [ Type(Asc)] Year
Filters: First Letter Of Last Name is C and Author is Chen, Zhenfang  [Clear All Filters]
Journal Article
Wang, H., M. Godara, Z. Chen, and H. Xie, "A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers", Sensors and Actuators A: Physical, Jan-03-2019.
Wang, H., Z. Chen, and H. Xie, "A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.
Conference Paper
Wang, H., M. Li, Y. Yu, Z. Chen, Y. Ding, H. Jiang, and H. Xie, "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.
Wang, H., Y. Yu, Z. Chen, H. Yang, H. Jiang, and H. Xie, "Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT", IEEE Sensors, New Delhi, India, IEEE, 2018.