Publications

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Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.
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Liu, Y., Y. Feng, X. Sun, L. Zhu, X. Cheng, Q. Chen, Y. Liu, and H. Xie, "Integrated tilt angle sensing for large displacement scanning MEMS mirrors", Optics Express, vol. 26, issue 20, pp. 25736, Jan-01-2018.
Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
Cheng, X., H. Lu, Z. Lou, H. Xie, W. Wang, and M. Zheng, "An integrated optoelectronic position sensor for MEMS scanning mirrors", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.