Publications

Found 1 results
Author [ Title(Asc)] Type Year
Filters: Author is L Erdmann  [Clear All Filters]
A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 
P
Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.