Publications

Found 6 results
Author Title [ Type(Asc)] Year
Filters: Author is Guo, Zhong Yang  [Clear All Filters]
Conference Paper
Sun, H., K. Jia, Y. Ding, Z. Yang Guo, X. Liu, G. Zhen Yan, and H. Xie, "A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.
Sun, H., K. Jia, Z. Yang Guo, X. S. Liu, G. Zhen Yan, and H. Xie, A Monolithic Inertial Measurement Unit Fabricated with Improved DRIE Post-CMOS Process: IEEE, 2010.
Guo, Z. Yang, X. S. Liu, Z. Chuan Yang, Q. Cheng Zhao, L. Tao Lin, H. Xie, and G. Zhen Yan, "Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 264 - 267, 2010.