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Martin, D., K. Kadirvel, J. Liu, R. M. Fox, M. Sheplak, and T. Nishida, "Surface and Bulk Micromachined Dual Back-Plate Condenser Microphone", 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), Miami, FL, January, 2005.
M
Martin, D., J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida, "A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements", J. Microelectromechanical Systems, vol. 16, no. 6, pp. 1289-1302, DEC, 2007.