Publications

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Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie, "An auto-aligned vertical comb drive for low-cost variable optical attenuators", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.
Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie, "A mems variable optical attenuator based on a vertical comb drive with self-elevated stators", Sensors and Actuators A: Physical, vol. 271, pp. 398 - 408, Jan-03-2018.