Publications

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Conference Paper
Sun, H., K. Jia, Y. Ding, Z. Yang Guo, X. Liu, G. Zhen Yan, and H. Xie, "A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.