Publications

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F
Filangeri, E., and T. Nishida, "Depth profile of thermal donor in boron-doped Czochralski-grown silicon", Journal of Applied Physics, vol. 75, pp. 7931-7934, JUN, 1994.
Freidkes, B., D. A. Mills, C. Keane, L. S. Ukeiley, and M. Sheplak, "Development of a Two-Dimensional Wall Shear Stress Sensor for Wind Tunnel Applications", AIAA Scitech 2019 ForumAIAA Scitech 2019 Forum, San Diego, CaliforniaReston, Virginia, American Institute of Aeronautics and Astronautics, 2019.
H
Homeijer, B., L. Cattafesta, T. Nishida, and M. Sheplak, "Design of a MEMS Piezoresistive Microphone for use in Aeroacoustic Measurements", 13th AIAA/CEAS Aeroacoustics Conference and Exhibit, Rome, Italy, May, 2007.
Horowitz, S., T. Nishida, L. Cattafesta, and M. Sheplak, "Development of a micromachined piezoelectric microphone for aeroacoustics applications", J. Acoust. Soc. Am., vol. 122, no. 6, pp. 3428-3436, DEC, 2007.
Horowitz, S., T. Nishida, L. Cattafesta, and M. Sheplak, "Design and Characterization of a Micromachined Piezoelectric Microphone", 11th AIAA/CEAS Aeroacoustics Conference, AIAA Paper 2005-2998, May, 2005.
Hwangbo, S., S-P. Fang, H. An, Y-K. Yoon, A. B. Shorey, and A. M. Kazmi, "Directional through Glass Via (TGV) Antennas for Wireless Point-to-Point Interconnects in 3D Integration and Packaging", 2017 IEEE 67th Electronic Components and Technology Conference (ECTC), Orlando, FL, USA, IEEE, 2017.
J
Jansson, D., J. Mathew, J. Hubner, M. Sheplak, and L. Cattafesta, "Design and Validation of an Aeroacoustic Test Facility", 8th AIAA / CEAS Aeroacoustics Conference, AIAA Paper 2002-2466, Breckenridge, CO, June, 2002.
Jia, K., S. Pal, L. Wu, D. Hamilton, and H. Xie, "Dental optical coherence tomography employing miniaturized MEMS-based imaging probe", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, pp. 1 -2, 2009.
Jo, B., M. Ghatge, and R. Tabrizian, "d15-Enhanced shear-extensional aluminum nitride resonators with k 2 t> 4.4% for wide-band filters", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, IEEE, 2017.
K
Kadirvel, K., D. Martin, J. Liu, R. M. Fox, M. Sheplak, L. Cattafesta, and T. Nishida, "Design, Modeling and Simulation of a Closed-Loop Controller for a Dual Backplate MEMS Capacitive Microphone", 6th IEEE Conference on Sensors, Atlanta, GA, pp. 87-90, October, 2007.
Kadirvel, K., R. Taylor, S. Horowitz, W. Hunt, M. Sheplak, and T. Nishida, "Design and Characterization of a MEMS Optical Microphone", 42nd Aerospace Sciences Meeting and Exhibit, AIAA Paper 2004-1030, Reno, NV, January, 2004.
Kasyap, A., A. Phipps, T. Nishida, M. Sheplak, and L. Cattafesta, "Development of MEMS-based Piezoelectric Vibration Energy Harvesters", SEC IMAC, 02/2010.
Khnouf, R., B. Chapman, S. Jin, D. J. Beebe, and H. Z. Fan, "Detection of ricin in beverages using cell-free protein synthesis in a microfluidic device", Sensors and Actuators B: Chemical, vol. 221, pp. 723 - 729, 12/2015.
Kim, J., Y-K. Yoon, and M. G. Allen, "Double-side exposure UV-LED CNC lithography for fine 3D microfabrication", 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, IEEE, 2017.
Kim, H-in., R. Bowrothu, W. Lee, C. Smith, L. Hayati, D. P. Arnold, and Y-K. Yoon, "Demonstration of Substrate-Embedded Nonreciprocal Millimeter-Wave Circulators For System-In-Packaging", 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Tokyo, Japan, IEEE, 2022.
Kim, H-in., D. P. Arnold, and Y-K. Yoon, "Demonstration of Substrate-Embedded Nonreciprocal Millimeter-Wave Circulators For System-In-Packaging", 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022.
Kim, J., PF. Jao, C. Kim, and Y.K. Yoon, "Dispense and self planarization process on a modified surface for multiple height 3-D microfabrication", The 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11), Beijing, China, 06/2011.
M
Manzanas, C., X. Jiang, J. A. Lednicky, and H. Z. Fan, "Development of Ball-Enabled Miniaturized Valves for Sample Preparation and Microheaters for Pathogen Detection", ASME 2020 Fluids Engineering Division Summer Meeting (FEDSM2020), 2020.
Martin, D., J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida, "Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements", 44th AIAA Aerospace Sciences Meeting and Exhibit, AIAA Paper 2006-1246, Reno, NV, January, 2006.
Masilamani, S., I. Boniche, C. D. Meyer, R. Durscher, and D. P. Arnold, "Design of a tubular microfabricated power generation system for hot exhaust streams", Tech. Dig. 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2007), Freiburg, Germany, pp. 249-252, November, 2007.