Publications

Found 3 results
Author Title [ Type(Asc)] Year
Filters: First Letter Of Title is A and Author is Benjamin A. Griffin  [Clear All Filters]
Journal Article
Griffin, B. A., M. D. Williams, C. S. Coffman, and M. Sheplak, "Aluminum Nitride Ultrasonic Air-Coupled Actuator ", Journal of Microelectromechanical Systems, vol. 20, no. 2, pp. 476-486, 04/2011.
Williams, M. D., B. A. Griffin, T. N. Reagan, J. R. Underbrink, and M. Sheplak, "An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications", Journal of Microelectromechanical Systems, vol. 21, no. 2, 04/2012.
Conference Paper
Williams, M. D., B. A. Griffin, A. Ecker, J. Meloy, and M. Sheplak, "An Aluminum Nitride Piezoelectric Microphone for Aeroacoustics Applications", Hilton Head 2010: A Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, Transducer Research Foundation, Inc., 06/2010.