Publications

Found 3 results
Author Title Type [ Year(Asc)]
Filters: First Letter Of Title is A and Author is Matthew D Williams  [Clear All Filters]
2012
Williams, M. D., B. A. Griffin, T. N. Reagan, J. R. Underbrink, and M. Sheplak, "An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications", Journal of Microelectromechanical Systems, vol. 21, no. 2, 04/2012.
2011
Griffin, B. A., M. D. Williams, C. S. Coffman, and M. Sheplak, "Aluminum Nitride Ultrasonic Air-Coupled Actuator ", Journal of Microelectromechanical Systems, vol. 20, no. 2, pp. 476-486, 04/2011.
2010
Williams, M. D., B. A. Griffin, A. Ecker, J. Meloy, and M. Sheplak, "An Aluminum Nitride Piezoelectric Microphone for Aeroacoustics Applications", Hilton Head 2010: A Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, Transducer Research Foundation, Inc., 06/2010.