Publications

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Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.
Zhang, X., S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid", Optics Express, vol. 24, issue 4, no. 4, pp. 3479-3487, 02/2016.
Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
Zhang, X., C. Duan, L. Liu, X. Li, and H. Xie, "A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage", Sensors and Actuators A: Physical, vol. 233, pp. 239 - 245, 09/2015.
Zhang, X., B. Li, X. Li, and H. Xie, "A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 912 - 915, 6/2015.
Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.
Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.