Publications

Found 10 results
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D
Tseng, V. F. G., and H. Xie, "Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching", Journal of Micromechanics and Microengineering, vol. 23, issue 3, pp. 035025, 03/2013.
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
H
Li, J., V. Tseng, Z. Xiao, and H. Xie, "A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC-DC Converters", IEEE Transactions on Power Electronics, pp. 1 - 1, 2016.
Li, J., V. Farm- Guoo Tseng, Z. Xiao, and H. Xie, "A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC–DC Converters", IEEE Transactions on Power Electronics, vol. 32, issue 5, pp. 3858 - 3867, Jul-07-2016, 2017.
I
Tseng, V. Farm- Guoo, and H. Xie, "Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching", IEEE Transactions on Electron Devices, vol. 61, issue 7, pp. 2302 - 2308, 7/2014.
Tseng, V. Farm- Guoo, L. Wu, and H. Xie, "Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 176 - 179, 6/2015.