Publications
Found 6 results
Author Title [ Type] Year Filters: Author is Shekhawat, Aniruddh [Clear All Filters]
, , , , ,
"Tiered deposition of sub-5 nm ferroelectric Hf 1-x Zr x O 2 films on metal and semiconductor substrates", Applied Physics Letters, vol. 112, issue 19, pp. 192901, Jul-05-2018.
,