Publications

Found 3 results
[ Author(Asc)] Title Type Year
Filters: Author is Walters, Glen  [Clear All Filters]
A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 
W
Walters, G., A. Shekhawat, N. G. Rudawski, S. Moghaddam, and T. Nishida, "Tiered deposition of sub-5 nm ferroelectric Hf 1-x Zr x O 2 films on metal and semiconductor substrates", Applied Physics Letters, vol. 112, issue 19, pp. 192901, Jul-05-2018.
Walters, G., A. Shekhawat, J. Jones, S. Moghaddam, and T. Nishida, Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films, 2020.
Walters, G., A. Shekhawat, N. G. Rudawski, S. Moghaddam, and T. Nishida, Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates, 2018.