Publications
Found 1 results
Author Title [ Type
] Year Filters: First Letter Of Title is S and Author is Forgey, Christian [Clear All Filters]
, "A Segmented‐Target Sputtering Process for Growth of Sub‐50 nm Ferroelectric Scandium–Aluminum–Nitride Films with Composition and Stress Tuning", physica status solidi (RRL) – Rapid Research Letters, vol. 15, issue 5, pp. 2100087, Jan-05-2021.