Publications

Found 1 results
Author Title Type [ Year(Asc)]
Filters: First Letter Of Title is P and Author is T Kenny  [Clear All Filters]
2002
Chow, E., A. Partridge, V. Chandrasekaran, M. Sheplak, T. Nishida, C. Quate, and T. Kenny, "Process Compatible Polysilicon-Based Electrical Through-Wafer Interconnects In Silicon Substrates", J. Microelectromechanical Systems, vol. 11, no. 6, pp. 631-640, JUL, 2002.