Publications
Found 3 results
[ Author
Filters: First Letter Of Title is P and Author is Huikai Xie [Clear All Filters]
"Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.
, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.
, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", International Journal of Nonlinear Sciences and Numerical Simulation, vol. 3, no. 3-4, 2002.
,