Publications

Found 3 results
Author Title [ Type(Desc)] Year
Filters: First Letter Of Title is P and Author is Gary K. Fedder  [Clear All Filters]
Conference Paper
Xie, H., G. K. Fedder, Z. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.
Journal Article
Xie, H., G. K. Fedder, Y. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", International Journal of Nonlinear Sciences and Numerical Simulation, vol. 3, no. 3-4, 2002.
Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.