Publications

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Todd, S., A. Jain, H. Qu, and H. Xie, "A Multi-Degree-of-Freedom Micromirror Utilizing Inverted-Series-Connected Bimorph Actuators", Journal of Optics A: Pure and Applied Optics, vol. 8, pp. s352-s359, 06/2006.
Xie, H., H. Sun, K. Jia, D. Fang, and H. Qu, "Multi-axis integrated CMOS-MEMS inertial sensors", 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, IEEE, pp. 1394 - 1395, 2010.
Jia, K., and H. Xie, "Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage", 2007 Conference on Lasers and Electro-Optics (CLEO)2007 Conference on Lasers and Electro-Optics (CLEO), Baltimore, MD, USA, IEEE, pp. 1 - 2, 2007.
Wang, W., J. Chen, Q. Tanguy, and H. Xie, "A Monolithic Michelson interferometer with a large piston MEMS micromirror", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.
Sun, H., K. Jia, Z. Yang Guo, X. S. Liu, G. Zhen Yan, and H. Xie, A Monolithic Inertial Measurement Unit Fabricated with Improved DRIE Post-CMOS Process: IEEE, 2010.
Sun, H., K. Jia, Y. Ding, Z. Yang Guo, X. Liu, G. Zhen Yan, and H. Xie, "A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.
Wang, D., S. J. Koppal, and H. Xie, "A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications", Journal of Microelectromechanical Systems, pp. 1 - 6, Jan-01-2020.
Xie, H., "Monolithic CNT-CMOS Integration by Maskless Post-CMOS Microfabrication and Localized Heating", CMOS Emerging Technologies Workshop, Vancouver, BC, Canada, 2009.
Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer with A Low-Noise, Low-Power Dual Chopper Amplifier", Solid-state Sensors, Actuators and Microsystem Workshop, Hilton Head, SC, pp. 224-227, June, 2006.
Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier", IEEE Sensors Journal, vol. 8, issue 9, pp. 1511 - 1518, 09/2008.
Li, M., Q. Chen, Y. Liu, Y. Ding, and H. Xie, "Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors", Micromachines, vol. 8, issue 10, pp. 289, Jan-10-2017.
Han, F., W. Wang, X. Zhang, and H. Xie, "Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers", Journal of Microelectromechanical Systems, vol. 4, pp. 750-760, 2016.
Zhang, H., D. Xu, X. Zhang, Q. Chen, H. Xie, and S. Li, "Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror", Sensors, vol. 15, issue 12, pp. 30991 - 31004, Jan-12-2015.
Wu, L., A. Pais, S. Samuelson, S. Guo, and H. Xie, "A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface", 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, CO., IEEE, 06/2009.
Wang, W., S. R. Samuelson, J. Chen, and H. Xie, "Miniaturizing Fourier Transform Spectrometer With an Electrothermal Micromirror", IEEE Photonics Technology Letters, vol. 27, issue 13, pp. 1418 - 1421, 7/2015.
Dai, X., L. Xi, C. Duan, H. Yang, H. Xie, and H. Jiang, "Miniature probe integrating optical-resolution photoacoustic microscopy, optical coherence tomography, and ultrasound imaging: proof-of-concept", Optics Letters, vol. 40, issue 12, pp. 2921, 2015.
Xi, L., C. Duan, H. Xie, and H. Jiang, "Miniature probe combining optical-resolution photoacoustic microscopy and optical coherence tomography for in vivomicrocirculation study", Applied Optics, vol. 52, issue 9, pp. 1928, 2013.
Liao, W., W. Liu, L. Xi, J. Sun, Y. Zhu, L. Wu, H. Jiang, and H. Xie, "Miniature Photoacoustic Imaging Probe Using MEMS Scanning Micromirror", IEEE Optical MEMS and Nanophotonics, Istanbul, Turkey, 08/2011.
Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.
Han, F., W. Wang, X. Zhang, and H. Xie, "Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror", Optics Express, vol. 24, issue 20, pp. 22650, Jan-01-2016.
Wu, L., A. Pais, S. Samuelson, S. Guo, and H. Xie, "A Miniature Fourier Transform Spectrometer by a Large-Vertical-Displacement Microelectromechanical Mirror", OSA Spring Optics & Photonics Congress,, Vancouver, Canada, April, 2009.
Wu, L., A. Pais, S. Samuelson, S. Guo, and H. Xie, "A Miniature Fourier Transform Spectrometer by a Large-Vertical-Displacement Microelectromechanical Mirror", Fourier Transform Spectroscopy: Optical Society of America, pp. FWD4, 2009.
Yang, H., D. Wang, T. Shan, X. Dai, H. Xie, L. Yang, and H. Jiang, "Miniature fluorescence molecular tomography (FMT) endoscope based on a MEMS scanning mirror and an optical fiberscope", Physics in Medicine & Biology, vol. 64, issue 12, pp. 125015, Jan-06-2019.
Yang, H., D. Wang, T. Shan, X. Dai, H. Xie, L. Yang, and H. Jiang, A miniature fluorescence molecular tomography endoscope, 2019.
Liu, L., L. Wu, J. Sun, E. Lin, and H. Xie, "Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias", Journal of Biomedical Optics, vol. 16, issue 2, pp. 026006, 2011.